Browsing Materials & Nanotechnology by Author "Atanasov, Yuriy Andreev"
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Laser-Assisted Advanced Assembly for MEMS Fabrication
Atanasov, Yuriy Andreev (North Dakota State University, 2014)Micro Electro-Mechanical Systems (MEMS) are currently fabricated using methods originally designed for manufacturing semiconductor devices, using minimum if any assembly at all. The inherited limitations of this approach ...